RF Power Supplies

Post Date: 5/18/2008
Expiry Date: 8/16/2008

RF Power Supplies

Detailed Product Description

Performance:
The CX series power supplies start at power ranges from 600 to 3500 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semicon-ductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
CX High Power Supplies:
The CX series extends to high-power ranges of 5000 and 10,000 Watts.

Features:
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Patented S-Technology provides ultra-stable out-put. This stabilizing technology optimizes ampli-fier performance, reducing power-gain changes caused by plasma impedance fluctuations.
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ETL Marked for product safety and SEMI F47 compliant
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Local control via encoder and softkey inputs
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Standard RS-232 and analog/digital control
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Active front panel with full controls and programmable microprocessor
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Control circuitry ensures consistency during high VSWR conditions

Options:
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Wide range of AC input line voltages available
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External frequency control
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Master/Slave operation

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Shanghai Gaohe Import & Export Co., Ltd.

RF Power Supplies

Detailed Product Description

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