Size of transparent quartz glass crucibles for semiconductor:
Outside dia Height Radius of bottom Thickness Wall thickness tolerance at the same section
80 0.5/0.8 60 2 D-1/2 2.0 0.5 0.3
90 0.5/0.8 70 2 D-1/2 2.0 0.5 0.3
100 0.5/1.0 80 3 D-1/2 2.3 0.5 0.3
106 0.5/1.0 90 3 D-1/2 2.3 0.5 0.3
114 0.5/1.0 75 3 D-1/2 2.3 0.5 0.3
130 0.5/1.0 110 3 D-1/2 2.5 0.5 0.4
134 0.5/1.0 110 3 D-1/2 2.5 0.5 0.4
153 0.5/2.0 153 3 D-1/2 3.0 0.5 0.4
178 0.5/5 178 3 D-1/2 3.0 0.5 0.4
203 0.5/5 203 3 D-1/2 3.0 0.5 0.4
Coating weight:
For quartz glass crucibles: According to plant standard, coating weight inside crucible on every 100cm3 no less than 1.44g, if users require more coating, coating weight may be increased.
For quartz glass wares(including boats and diffusion tubes etc): Coating weight of their inner surface is>1g/100cm2.