Sino Wafer Electronic Material Co., Ltd.
China Manufacturer with main products: Silicon Wafer, Quartz Wafer, Sapphire Wafer, Semiconductor, Wafer, IC grade, Borofloat, Fused silica |
Quartz wafer
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Export Markets: | North America, South America, Eastern Europe, Southeast Asia, Africa, Oceania, Mid East, Eastern Asia, Western Europe |
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Specifications
Material | Fused silica/Borofloat/B270 etc | |||||
spec | unit | 3" | 4" | 5" | 6" | |
Diameter/size(or square) | mm | 76.2 | 100 | 125 | 150 | |
Tol(±) | mm | 0.25 | 0.5 | 0.5 | 0.5 | |
Thickness | mm | 0.10mm or more | 0.18mm or more | 0.30mm or more | 0.50mm or more | |
Primary reference flat | mm | 22mm or customized | 32.5mm or customized | 42.5mm or customized | 57.5mm or customized | |
LTV (5mmx5mm) | µm | < 2 | < 2 | < 2 | < 2 | |
TTV | µm | < 8 | < 10 | < 15 | < 20 | |
Bow | µm | ±20 | ±25 | ±40 | ±40 | |
Warp | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | |
PLTV | % | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | |
Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | ||||
Surface Type | Single Side Polished /Double Sides Polished | |||||
Polished side Ra | nm | ≤1 | ||||
Back Side Criteria | µm | general 0.2-0.5 or as customized | ||||
Appearance | Contamination, | None | ||||
Particles ¢>0.3 µ m | <= 30 | |||||
Saw Marks, striations | None | |||||
Scratch | None | |||||
Cracks, crowsfeet, saw marks, stains | None |
we can also customize according to your needs, if you have any enquiry | ||||
please feel free to contact us. |
Service Guarantee
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Free Service Charge
ECVV doesn't charge any service fee to Buyers for buying this product.
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ECVV Supply
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Product Quality Commitment
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Deposit Service Commitments
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After paying a deposit, if the purchasing order is not completed because of unsatisfied ECVV services, ECVV will refund your deposit.
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