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Zhengzhou Protech Mechanical Equipment Co., Ltd.

China Manufacturer with main products: Lab Furnace, Tube Furnace, Electric Lab Furnace, Muffle Furnace, CVD System, PECVD System

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Protech PECVD system for thin film coating

FOB Price: 33,000.00 - 36,500.00 USD/Set
Supply Ability: 1,200 Set/Sets per Month
Shipping: By air, by sea, by express
Payment Terms: L/C, D/A, D/P, T/T, Western Union
In Stock
Export Markets: North America, South America, Eastern Europe, Southeast Asia, Africa, Oceania, Mid East, Eastern Asia, Western Europe
Place of Origin: Henan in China
Packaging Details: poly wooden package outside, plastic packaged to prevent the dust, poly foam filled to protect shipm

Quick Details

  • General Use: Commercial Furniture
  • Type: Laboratory Furniture
  • Model Number: PT-1200T-4CVDPE
  • Brand Name: Protech
  • Size: Dia. 80x 440x1000mmLength
  • Material: PECVD system
  • Name: PECVD system
  • RF power: power 500W, 13.56Hz
  • Max. temperature: 1200C
  • Working temperature: 0~1150C
  • Temperature control: digital programmable and PID automatic control
  • Temperature accuracy: +/-1.C
  • Working chamber: Dia. 80x 440x1000mmLength
  • Power supply: 208V~240V, 50/60Hz
  • Anti-corrosive pressure gauge Brand: Inficon
  • Gas mixer tank: Four precise MFC with digital display to control the gas flow automatically

Specifications

Protech PECVD system for thin film coating

PT-1200T-4CVDPE is a compact CVD system. It consists of Plasma RF power source, split tube furnace, 4 channels mass flow meter with gas mixing tank and high quality mechanical pump. The CVD system is mainly used for deposit thin film even in nano-scale, from a gas state to a solid state, such as, diamond CVD coating, graphene growth, etc.

Outstanding features

1)Solid surface can be threat with plasma power
2)Gas flow can be accurately controlled by the gas mixer
3)Suitable for different material of deposition, including, SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Main technical data

Name Item  Data
1) RF power  Max. power 500W
 RF frequency  13.56MHz
 Reflection power 200W
 RF power output port 50?
 Cooling  208~240VAC
2) Preheating furnace Max. temperature 1200C
 Working temperature 0~1150C
 Temperature control Digital programmable and PID automatic control
 Temperature accuracy  +/-1.C
 Working chamber Dia. 80x 440x1000mmLength
 Power supply 208V~240V, 50/60Hz
3)Anti-corrosive pressure gauge Brand  Inficon
 Type Anti-corrosive, gas-type independent
  high accuracy and reproducibility at atmosphere
  Easy to change plug and play sensor element
4) Vacuum pump set Max. Vacuum pressure 10E-2Torr
 Type Heavy duty rotary vane vacuum pump
 Model PT-RT-4
5) Gas mixer tank  Four precise MFC with digital display to control the gas flow automatically
 MFC1 Flow range from 0~100sccm
 MFC2 Flow range from 0~200sccm
 MFC3 Flow range from 0~500sccm
 MFC4 Flow range from 0~1000sccm
  The flow range are optional according to your concrete working condition
  Needle valve and connect tubes are also included

Service Process

Service Guarantee

  • Free Service Charge

    ECVV doesn't charge any service fee to Buyers for buying this product.

  • ECVV Supply

    ECVV is responsible for supply, and provides product quality inspection, fund supervision and supply chain services.

  • Product Quality Commitment

    ECVV China Sourcing Agent will assess the reputation and supply ability of the factory and conduct field trips to select the high-quality Chinese factories for buyers.

  • Deposit Service Commitments

    In order to improve the quality of service, ECVV will charge for a 100CNY deposit for the agent purchasing order, and the deposit will be part of subsequent purchasing costs.

    After paying a deposit, if the purchasing order is not completed because of unsatisfied ECVV services, ECVV will refund your deposit.

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