Beijing Technol Science Co., Ltd.

China Manufacturer with main products: Magnetron Sputtering Machine, Thermal Resistance Evaporation Coating Machine, E-Beam Evaporation Machine, Multi-Arc Ion Sputtering Plating...

Home  >Products Catalog > Multi-arc Ion Plating > TSU650 Multi-Arc Ion Sputtering Coater Multi-Function Vacuum Coater

TSU650 Multi-Arc Ion Sputtering Coater Multi-Function Vacuum Coater

Supply Ability: 5 Set(s) per Quarter
Shipping: FOB
Payment Terms: L/C, T/T

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Export Markets: North America, South America, Eastern Europe, Southeast Asia, Africa, Oceania, Mid East, Eastern Asia, Western Europe
Place of Origin: Beijing in China
Packaging Details: Exprot Wooden Case

Quick Details

  • Brand Name: Technol
  • Coating: Vacuum Coating
  • Substrate: Metal & Dielectric
  • Type: Multi-arc Ion Sputtering Plating
  • Condition: New
  • After-sales Service Provided: Engineers available to service machinery overseas
  • Warranty: 1 Year
  • Certification: ISO9001:2015
  • Weight: 1200kgs
  • Dimension(L*W*H): L2780*W1200*H2020mm
  • Power(W): 700000
  • Voltage: 380V
  • Model Number: TSU650

Specifications

Feature:Equipped with circular magnetron sputtering target, rectangular Magnetron sputtering target, multi-arc target, magnetic filter arc Source, etc. Combined with magnetron, ion plating and other various Functions, suitable for the universities and scientific research units with multiple coating requirements.


Main Function:

* the equipment can be used to prepare single and multi-layer metal Film, dielectric film, semiconductor film, sensor film, heat-resistant Alloy film, hard film, corrosion-resistant film, etc.;
* Coating Samples: silver, aluminum, copper, nickel, chromium, nickel-chromium Alloy, titanium nitride, titanium carbide, titanium Nitride, chromium nitride, titanium oxide, alumina, ITO, etc.;
* Applications: tool, mold, electronic accessories, metal shell, ceramic substrate, etc..


Application:Widely used in colleges & universities, research institutes and Enterprises of device R & D and manufacturing and small batch Production.

TSU650 Multiarc Ion Sputtering Coater Multifunction Vacuum Coater


Technical Parameters

Equipment Name Magnetron & Ion Sputtering Combination System
Model TSU650
Chamber Structure Vertical cylindrical front door structure, double-layer water cooling
Chamber Size 650H650mm
Rotating Workpiece Rack 350H400mm, 4~6 workstations revolution/rotation workpiece rest

Workpiece Rack Baking

 Temperature

Room temperature~5005(93241), adjustable and controllable

 (PID control temperature)

Workpiece Rack Movement 0-5RPM adjustable
Auxiliary ion source Bias voltage, auxiliary linear ion source(optional)
Cathode

Rectangular magnetron target, plane arc source, magnetic filter arc source,

 circular flat target(optional)

Control Method PLC Control/IPC automatic control(optional) 
Occupied Area (Mainframe) L2780W1200H2020mm  
Power 70kW 

Service Process

Service Guarantee

  • Free Service Charge

    ECVV doesn't charge any service fee to Buyers for buying this product.

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  • Product Quality Commitment

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  • Deposit Service Commitments

    In order to improve the quality of service, ECVV will charge for a 100CNY deposit for the agent purchasing order, and the deposit will be part of subsequent purchasing costs.

    After paying a deposit, if the purchasing order is not completed because of unsatisfied ECVV services, ECVV will refund your deposit.

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